Planar optical waveguide structure, and coupling structure thereof and coupling method thereof

ABSTRACT

A coupling structure includes a single mode active device and a planar optical waveguide. Specifically, the planar optical waveguide includes a silica waveguide for transmitting an optical signal, where the silica waveguide includes a coupling section and a conduction section; the coupling section is of a regular trapezoidal structure or an inverted trapezoidal structure, where a surface of the coupling section coupled to the single mode active device is a trapezoid top, and a surface of the coupling section connected with the conduction section is a trapezoid bottom; and a coupling gap is preset between the single mode active device and the planar optical waveguide.

This disclosure is a continuation of International Patent ApplicationNo. PCT/CN2016/110358, filed on Dec. 16, 2016, which is based upon andclaims priority to Chinese Patent Application No. 201610326883.4, filedon May 17, 2016, Chinese Patent Application No. 201610327114.6, filed onMay 17, 2016, and Chinese Patent Application No. 201610326163.8, filedon May 17, 2016, the entire contents of which are incorporated herein byreference.

TECHNICAL FIELD

The present disclosure relates to the technical field of opticalwaveguide coupling, and in particular, to a planar optical waveguidestructure, and a coupling structure thereof and a coupling methodthereof.

BACKGROUND

At present, mainstream 40G/100G optical modules are basicallyimplemented through free-space coupling technologies based on prisms,lenses, optical filters, and the like, and are characterized in acomplicated process, a need for active alignment, high packaging costs,and a great difficulty in larger-scale integration.

On the other hand, a photonic integration technology generally meansthat active devices (lasers, detectors, optical amplifiers, opticalmodulators, and the like) and passive devices (opticalsplitters/combiners, optical filters, opticalmultiplexers/demultiplexers, and the like) are integrated to implement amonolithic multi-functional optical device technology. The photonicintegration technology is considered as a powerful optical moduletechnology in the near future and especially in short-range opticalinterconnect applications such as data centers. However, how toeffectively couple light of a single mode laser to a planar opticalwaveguide (also known as Planar Lightwave Circuit, PLC) or othersilicon-based optical integrated chips is still a big issue at present.In addition to the coupling efficiency, how to make the process simpleand practicable and use automatic devices to achieve the effect ofreducing costs is also an important issue.

SUMMARY

The technical problem to be solved by embodiments of the presentdisclosure is how to effectively couple light of a single mode laser toa planar optical waveguide or other silicon-based optical integratedchips.

A further technical problem to be solved by the embodiments of thepresent disclosure is how to provide a planar optical waveguidestructure and a corresponding coupling structure and coupling method forsingle-core, multi-core, and hybrid multi-core application scenariosseparately.

The embodiments of the present disclosure apply the following technicalsolutions:

In a first aspect, an embodiment of the present disclosure provides acoupling structure based on a planar optical waveguide, where thecoupling structure includes a single mode active device and a planaroptical waveguide, specifically:

the planar optical waveguide includes a silica waveguide fortransmitting an optical signal, where the silica waveguide includes acoupling section and a conduction section;

the coupling section is of a regular trapezoidal structure or aninverted trapezoidal structure, where a surface of the coupling sectioncoupled to the single mode active device is a trapezoid top, and asurface of the coupling section connected with the conduction section isa trapezoid bottom;

a coupling gap is preset between the single mode active device and theplanar optical waveguide.

Alternatively, the coupling gap d has a value of 5 μm to 50 μm, and thecoupling gap is filled with a matching gel for refractive indexmatching.

Alternatively, when the single mode active device is specifically aGaussian single mode semiconductor laser having a center wavelength of1310 nm to 1660 nm and a far-field emission angle of 10° to 40° in the Xdirection and 10° to 45° in the Y direction, a trapezoid top surfacewidth W1 of the coupling section=2.6 μm, and a trapezoid top surfaceheight H1=4.4 μm; a trapezoid bottom surface width W2=3.3 μm, and atrapezoid bottom surface height H2=4.4 μm; and a trapezoid length L=800μm.

Alternatively, when the single mode active device has a light-emittingsurface refractive index of 1.48, the matching gel has a refractiveindex of 1.48.

Alternatively, the coupling structure including the single mode activedevice and the planar optical waveguide specifically includes anEthernet passive optical network (EPON) optical module, a gigabitpassive optical network (GPON) optical module, high-speed single-channeloptical modules SFP and SFP+ in data communication, or parallel modulesQSFP and QSFP28 for 40G and 100G optical transmission.

In a second aspect, an embodiment of the present disclosure furtherprovides a planar optical waveguide structure, where the planar opticalwaveguide structure includes a silica waveguide for transmitting anoptical signal, specifically:

the silica waveguide includes a coupling section and a conductionsection;

the coupling section is of a regular trapezoidal structure or aninverted trapezoidal structure, where a surface of the coupling sectionfor being coupled to the single mode active device is a trapezoid top,and a surface of the coupling section connected with the conductionsection is a trapezoid bottom.

Alternatively, a trapezoid top surface width W1 of the couplingsection=2.6 μm, and a trapezoid top surface height H1=4.4 μm; atrapezoid bottom surface width W2=3.3 μm, and a trapezoid bottom surfaceheight H2=4.4 μm; and a trapezoid length L=800 μm.

Alternatively, a single mode active device mounting base is disposed onthe planar optical waveguide, and a bonding pad and an alignment markare disposed on the base.

In a third aspect, an embodiment of the present disclosure furtherprovides a coupling method based on a planar optical waveguide. A silicawaveguide in a planar optical waveguide includes a coupling section anda conduction section, and the method includes:

generating the planar optical waveguide, where the coupling section isof a trapezoidal structure, where a trapezoid top surface width W1=2.6μm, and a trapezoid top surface height H1=4.4 μm; a trapezoid bottomsurface width W2=3.3 μm, and a trapezoid bottom surface height H2=4.4μm; and a trapezoid length L=800 μm;

generating a single mode active device mounting base on the planaroptical waveguide, and disposing a bonding pad and an alignment mark onthe base;

confirming that a selected single mode active device is specifically aGaussian single mode semiconductor laser having a center wavelength of1310 nm to 1660 nm and a far-field emission angle of 10° to 40° in the Xdirection and 10° to 45° in the Y direction; and

welding the semiconductor laser according to the alignment mark on theplanar optical waveguide.

Alternatively, after the single mode active device and the planaroptical waveguide are welded together, there is a preset coupling gapbetween the single mode active device and the planar optical waveguide,and the method further includes:

selecting a matching gel according to coating parameters of the laserand a refractive index of a silica waveguide, and filling the couplinggap with the selected matching gel.

In a fourth aspect, an embodiment of the present disclosure furtherprovides a planar optical waveguide structure, where the planar opticalwaveguide internally includes a silica main waveguide for transmittingan optical signal, and an auxiliary waveguide for assisting lightentering;

the auxiliary waveguide includes a silicon nitride auxiliary waveguidethat is closely attached to the silica main waveguide.

Alternatively, the silicon nitride auxiliary waveguide includes twosub-auxiliary waveguides, where a first sub-auxiliary waveguide islocated on an upper surface of the silica main waveguide, and a secondsub-auxiliary waveguide is located on a lower surface of the silica mainwaveguide.

Alternatively, the first sub-auxiliary waveguide and the secondsub-auxiliary waveguide each include a transition portion and a coneportion, where the transition portion is a rectangular cube extending ina direction of light transmission; and the cone portion is of astructure with a bottom surface connected with the transition portionand a cone top extending in the direction of light transmission.

Alternatively, the silicon nitride auxiliary waveguide includes threesub-auxiliary waveguides, where a first sub-auxiliary waveguide, asecond sub-auxiliary waveguide and a third sub-auxiliary waveguide arelocated on an upper surface of the silica main waveguide; and the threesub-auxiliary waveguides are each of a cone structure, wherein a conetop extends in a direction of light transmission.

Alternatively, the three sub-auxiliary waveguides are spaced apart by apredetermined distance, and the three sub-auxiliary waveguides arearranged in parallel.

Alternatively, the auxiliary waveguide further includes a silicaauxiliary waveguide, specifically:

the silicon nitride auxiliary waveguide and the silica auxiliarywaveguide each include a transition portion and a cone portion, thetransition portion is a rectangular cube extending in a direction oflight transmission; the cone portion is of a structure with a bottomsurface connected with the transition portion and a cone top extendingin the direction of light transmission, where the silicon nitrideauxiliary waveguide is located on the upper surface of the silica mainwaveguide, and the silica auxiliary waveguide is located on the uppersurface of the silica main waveguide and covers the silicon nitrideauxiliary waveguide.

In a fifth aspect, an embodiment of the present disclosure furtherprovides a coupling structure based on a planar optical waveguide, wherethe coupling structure includes a planar optical waveguide with thestructure described in the fourth aspect, and the coupling structurefurther includes a single mode active device, specifically:

the planar optical waveguide is provided with a single mode activedevice fixing platform located on a light-incident side of the silicamain waveguide and the silicon nitride auxiliary waveguide;

a bonding pad and an alignment mark are disposed on the fixing platform,the bonding pad is configured to be welded to a corresponding bondingpad on the single mode active device; and the alignment mark isconfigured to provide addressing of a binding welding spot for anautomatic binding machine;

in the coupling structure, a coupling gap d is disposed between thesingle mode active device and light inlets of the silica main waveguideand the silicon nitride auxiliary waveguide, and the coupling gap isfilled with a matching gel for refractive index matching.

In a sixth aspect, an embodiment of the present disclosure furtherprovides a coupling method based on a planar optical waveguide,including:

determining an optical wavelength and a far-field emission angle of asingle mode active device;

selecting, according to the far-field emission angle, a planar opticalwaveguide adapted to the far-field emission angle;

welding the single mode active device according to a bonding pad and analignment mark that are disposed on the planar optical waveguide; and

filling a coupling gap between a light outlet of the single mode activedevice and a light inlet of the planar optical waveguide with a matchinggel.

Alternatively, the planar optical waveguide includes a main waveguideand an auxiliary waveguide, and the selecting, according to thefar-field emission angle, a planar optical waveguide adapted to thefar-field emission angle specifically includes:

determining, according to the far-field emission angle, that the singlemode active device is a transverse elliptical light source or alongitudinal elliptical light source;

if the single mode active device is the transverse elliptical lightsource, selecting a planar optical waveguide with an auxiliary waveguideembedded in a single-side tiling manner on a main waveguide; or

if the single mode active device is the longitudinal elliptical lightsource, selecting a planar optical waveguide with an auxiliary waveguideembedded in a double-side tiling manner on a main waveguide.

Alternatively, the planar optical waveguide with the auxiliary waveguideembedded in a single-side tiling manner on the main waveguide isspecifically implemented as follows:

a silicon nitride auxiliary waveguide includes three sub-auxiliarywaveguides, where a first sub-auxiliary waveguide, a secondsub-auxiliary waveguide and a third sub-auxiliary waveguide are locatedon an upper surface of a silica main waveguide; and the threesub-auxiliary waveguides are each of a cone structure, where a cone topextends in a direction of light transmission; or

a silicon nitride auxiliary waveguide and a silica auxiliary waveguideeach include a transition portion and a cone portion, and the transitionportion is a rectangular cube extending in a direction of lighttransmission; the cone portion is of a structure with a bottom surfaceconnected with the transition portion and a cone top extending in thedirection of light transmission; where the silicon nitride auxiliarywaveguide is located on an upper surface of a silica main waveguide, andthe silica auxiliary waveguide is located on the upper surface of thesilica main waveguide and covers the silicon nitride auxiliarywaveguide;

the planar optical waveguide with the auxiliary waveguide embedded in adouble-side tiling manner on the main waveguide is specificallyimplemented as follows:

a silicon nitride auxiliary waveguide includes two sub-auxiliarywaveguides, where a first sub-auxiliary waveguide is located on an uppersurface of a silica main waveguide, and a second sub-auxiliary waveguideis located on a lower surface of the silica main waveguide.

In a seventh aspect, an embodiment of the present disclosure furtherprovides a planar optical waveguide structure, where the planar opticalwaveguide internally includes a silica main waveguide for transmittingan optical signal, and an auxiliary waveguide for assisting lightentering;

the auxiliary waveguide includes one or more silica auxiliary waveguidesthat are disposed at a predetermined center distance from the silicamain waveguide.

Alternatively, the auxiliary waveguide specifically includes twosub-auxiliary waveguides, where a first sub-auxiliary waveguide islocated on an upper side of the silica main waveguide, and a secondsub-auxiliary waveguide is located on a lower side of the silica mainwaveguide.

Alternatively, the first sub-auxiliary waveguide and the secondsub-auxiliary waveguide each include a regular trapezoidal structure,where

a trapezoid top and a light inlet of the silica main waveguide arelocated on a same side; a trapezoid bottom extends in a direction oflight transmission, and a width of the trapezoid bottom is the same as awidth of the silica main waveguide, where

side faces of a first sub-auxiliary waveguide trapezoid and a secondsub-auxiliary waveguide trapezoid adjacent to upper and lower planes ofthe silica main waveguide are kept parallel to the upper and lowerplanes of the silica main waveguide respectively.

Alternatively, when a selected single mode active device has a centerwavelength of 1310 nm to 1660 nm and a far-field emission angle of25°×40°, parameters of the main waveguide and the auxiliary waveguideare specifically as follows:

a width W_(main) of the light inlet of the main waveguide=3.0 μm, and aheight H_(main)=3.0 μm;

a width W_(auxiliary in) of a light inlet of the auxiliary waveguide=2.6μm, and a height H_(auxiliary in)=3.0 μm;

a width W_(auxiliary out) of a trapezoid bottom of the auxiliarywaveguide=3.0 μm, and a height H_(auxiliary out)=3.0 μm;

a length L_(auxiliary) of the auxiliary waveguide=100 μm, and the centerdistance Ay between the main waveguide and the auxiliary waveguide=3.6μm.

Alternatively, the main waveguide and the auxiliary waveguide are in amulti-core planar optical waveguide structure, and the inside and theoutside of respective core layers of the main waveguide and theauxiliary waveguide are provided with cladding layers having similarrefractive indexes; and a relative refractive index difference is 0.013.

Alternatively, the auxiliary waveguide specifically includes eightsub-auxiliary waveguides, where a first sub-auxiliary waveguide islocated on an upper side of the silica main waveguide; a secondsub-auxiliary waveguide is located on a lower side of the silica mainwaveguide; a third sub-auxiliary waveguide is located on a left side ofthe silica main waveguide; a fourth sub-auxiliary waveguide is locatedon a right side of the silica main waveguide; a fifth sub-auxiliarywaveguide is located on an upper left side of the silica main waveguide,on a left side of the first sub-auxiliary waveguide, and on an upperside of the third sub-auxiliary waveguide; a sixth sub-auxiliarywaveguide is located on an upper right side of the silica mainwaveguide, on the right side of the first sub-auxiliary waveguide, andon an upper side of the fourth sub-auxiliary waveguide; a seventhsub-auxiliary waveguide is located on a lower left side of the silicamain waveguide, on a left side of the second sub-auxiliary waveguide,and on a lower side of the third sub-auxiliary waveguide; and an eighthsub-auxiliary waveguide is located on a lower right side of the silicamain waveguide, on a right side of the second sub-auxiliary waveguide,and on a lower side of the fourth sub-auxiliary waveguide.

Alternatively, each sub-auxiliary waveguide is specifically of a regulartrapezoidal structure, and four side faces connected with a trapezoidtop and a trapezoid bottom are all inclined planes, where the trapezoidtop and a light inlet of the silica main waveguide are located on a sameside of a multi-core planar optical waveguide.

Alternatively, the main waveguide and the auxiliary waveguide are in themulti-core planar optical waveguide structure, and the inside and theoutside of respective core layers of the main waveguide and theauxiliary waveguide are provided with cladding layers having similarrefractive indexes; and a relative refractive index difference is 0.013.

In an eighth aspect, an embodiment of the present disclosure furtherprovides a coupling structure based on a planar optical waveguide, wherethe coupling structure includes a planar optical waveguide with thestructure described in the seventh aspect, and the coupling structurefurther includes a single mode active device, specifically:

a multi-core planar optical waveguide is provided with a single modeactive device fixing platform located on a light-incident side of asilica main waveguide and a silica auxiliary waveguide;

a bonding pad and an alignment mark are disposed on the fixing platform,the bonding pad is configured to be welded to a corresponding bondingpad on the single mode active device; and the alignment mark isconfigured to provide addressing of a binding welding spot for anautomatic binding machine;

in the coupling structure, a coupling gap d is formed between the singlemode active device and light inlets of the silica main waveguide and thesilica auxiliary waveguide, and the coupling gap is filled with amatching gel for refractive index matching.

Alternatively, the coupling structure including the single mode activedevice and the multi-core planar optical waveguide specifically includesan EPON optical module, a GPON optical module, high-speed single-channeloptical modules SFP and SFP+ in data communication, or parallel modulesQSFP and QSFP28 for 40G and 100G optical transmission.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic view of a coupling structure based on a planaroptical waveguide according to an embodiment of the present disclosure;

FIG. 2 is a partial enlarged view of a top view of an A-A′ cross sectionof a regular trapezoidal structure in FIG. 1 according to an embodimentof the present disclosure;

FIG. 3 is a partial enlarged view of a cross-section, taken withreference to a B-B′ cross section in FIG. 2, of the regular trapezoidalstructure in FIG. 1 according to an embodiment of the presentdisclosure;

FIG. 4 is a partial enlarged view of a top view of an A-A′ cross sectionof an inverted trapezoidal structure in FIG. 1 according to anembodiment of the present disclosure;

FIG. 5 is a partial enlarged view of a cross-section, taken withreference to a B-B′ cross section in FIG. 4, of the inverted trapezoidalstructure in FIG. 1 according to an embodiment of the presentdisclosure;

FIG. 6 is a schematic flowchart of a coupling method based on a planaroptical waveguide according to an embodiment of the present disclosure;

FIG. 7 is a partial enlarged view of a top view of an A-A′ cross sectionin the prior art according to an embodiment of the present disclosure;

FIG. 8 is a partial enlarged view of a B-B′ cross section in FIG. 7 inthe prior art according to an embodiment of the present disclosure;

FIG. 9 is a view showing a correspondence between a coupling sectionwidth and coupling efficiency according to an embodiment of the presentdisclosure;

FIG. 10 is a view showing a correspondence between a coupling sectionwidth and a coupling gap according to an embodiment of the presentdisclosure;

FIG. 11 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure;

FIG. 12 is a schematic view of a coupling structure based on a planaroptical waveguide according to an embodiment of the present disclosure;

FIG. 13 is a partial enlarged view of a top view of an A-A′ crosssection in FIG. 12 according to an embodiment of the present disclosure;

FIG. 14 is a partial enlarged view of a front view of a correspondingportion of FIG. 13 in FIG. 12 according to an embodiment of the presentdisclosure;

FIG. 15 is a partial enlarged view of a left view of a B-B′ crosssection in FIG. 12 relative to FIG. 13 according to an embodiment of thepresent disclosure;

FIG. 16 is a partial enlarged view of a top view of the A-A′ crosssection in FIG. 12 according to an embodiment of the present disclosure;

FIG. 17 is a partial enlarged view of a top view of a C-C′ cross sectionin FIG. 12 according to an embodiment of the present disclosure;

FIG. 18 is a partial enlarged view of a front view of a correspondingportion of FIG. 16 in FIG. 12 according to an embodiment of the presentdisclosure;

FIG. 19 is a partial enlarged view of a left view of the B-B′ crosssection in FIG. 12 relative to FIG. 16 according to an embodiment of thepresent disclosure;

FIG. 20 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure;

FIG. 21 is a partial enlarged view of a top view of the A-A′ crosssection in FIG. 12 according to an embodiment of the present disclosure;

FIG. 22 is a partial enlarged view of a front view of a correspondingportion of FIG. 21 in FIG. 12 according to an embodiment of the presentdisclosure;

FIG. 23 is a partial enlarged view of a left view of the B-B′ crosssection in FIG. 12 relative to FIG. 21 according to an embodiment of thepresent disclosure;

FIG. 24 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure;

FIG. 25 is a partial enlarged view of a top view of the A-A′ crosssection in FIG. 12 according to an embodiment of the present disclosure;

FIG. 26 is a partial enlarged view of a front view of a correspondingportion of FIG. 25 in FIG. 12 according to an embodiment of the presentdisclosure;

FIG. 27 is a partial enlarged view of a left view of the B-B′ crosssection in FIG. 12 relative to FIG. 25 according to an embodiment of thepresent disclosure;

FIG. 28 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure;

FIG. 29 is a flowchart of a coupling method based on a planar opticalwaveguide according to an embodiment of the present disclosure;

FIG. 30 is a schematic view of a coupling structure of a multi-coreplanar optical waveguide according to an embodiment of the presentdisclosure;

FIG. 31 is a partial enlarged view of a top view of a C-C′ cross sectionin FIG. 30 according to an embodiment of the present disclosure;

FIG. 32 is a partial enlarged view of a top view of a A-A′ cross sectionin FIG. 30 according to an embodiment of the present disclosure;

FIG. 33 is a partial enlarged view of a cross-section, taken withreference to a D-D′ cross section in FIG. 32, in FIG. 30 according to anembodiment of the present disclosure;

FIG. 34 is a partial enlarged view of a B-B′ cross section view in FIG.30 with reference to FIG. 32 according to an embodiment of the presentdisclosure;

FIG. 35 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure;

FIG. 36 is another partial enlarged view of a top view of the A-A′ crosssection in FIG. 30 according to an embodiment of the present disclosure;

FIG. 37 is a partial enlarged view of a cross-section, taken withreference to a D-D′ cross section in FIG. 36, in FIG. 30 according to anembodiment of the present disclosure;

FIG. 38 is a partial enlarged view of a B-B′ cross section view in FIG.30 with reference to FIG. 36 according to an embodiment of the presentdisclosure; and

FIG. 39 is a view of location tolerance obtained based on a simulationtest according to an embodiment of the present disclosure.

DETAILED DESCRIPTION

To make the objectives, technical solutions, and advantages of thepresent disclosure clearer and more comprehensible, the followingfurther describes the present disclosure in detail with reference to theaccompanying drawings and embodiments. It should be understood that thespecific embodiments described herein are merely used to explain thepresent disclosure and are not intended to limit the present disclosure.

In the description of the present disclosure, orientation or positionrelationships indicated by the terms “inner”, “outer”, “longitudinal”,“transverse”, “upper”, “lower”, “top”, “bottom”, and the like areorientation or position relationships shown based on the accompanyingdrawings, and are merely for the convenience of description of thepresent disclosure, rather than for requiring the present disclosure tobe constructed and operated in a specific orientation. Therefore, theseterms should not be understood as a limitation to the presentdisclosure.

Furthermore, the technical features involved in various implementationsof the present disclosure described below may be combined with eachother as long as they do not conflict with each other.

For the convenience of description in various embodiments of the presentdisclosure, “highest coupling efficiency” is defined as highest couplingefficiency that can be achieved from an active device to an opticalwaveguide at a fixed operating wavelength, waveguide shape, and gap; “6dB alignment tolerance” is an allowable relative displacement betweenthe active device and the waveguide when the coupling efficiency isgreater than or equal to 25% (a 6 dB insertion loss). These twoparameters will be used as indicators to measure the pros and cons ofthe design.

Embodiment 1

Embodiment 1 of the present disclosure provides a coupling structurebased on a planar optical waveguide. The structure includes a singlemode active device and a planar optical waveguide PLC, as shown in FIG.1, specifically:

the planar optical waveguide PLC includes a silica waveguide fortransmitting an optical signal, where the silica waveguide includes acoupling section and a conduction section.

The single mode active device includes, but is not limited to, aFabry-Perot (FP) laser, a distributed feedback (DFB) laser, and anelectro-absorption modulated laser (EML), and a semiconductor opticalamplifier (SOA).

The coupling section is of a regular trapezoidal structure or aninverted trapezoidal structure, where a surface of the coupling sectioncoupled to the single mode active device is a trapezoid top, and asurface of the coupling section connected with the conduction section isa trapezoid bottom. As shown in FIG. 2, FIG. 2 is a top view of an A-A′cross section in FIG. 1, and shows a schematic view of a regulartrapezoidal structure. As shown in FIG. 4, FIG. 4 is a top view of theA-A′ cross section in FIG. 1, and shows a schematic view of an invertedtrapezoidal structure. FIG. 5 is a partial enlarged view of across-section, taken with reference to a B-B′ cross section in FIG. 4,of the inverted trapezoidal structure in FIG. 1 according to anembodiment of the present disclosure.

A coupling gap d is preset between the single mode active device and theplanar optical waveguide.

The coupling structure based on a planar optical waveguide and proposedin this embodiment of the present disclosure can complete passivealignment and direct coupling of the laser to the PLC, so that alignmenttolerance can be improved compared with the prior art. Based on theimprovement of the alignment tolerance, a requirement for processprecision of an automatic device can be further reduced, alignment andwelding time can be shortened, and a defective rate can be furtherreduced, thereby achieving a purpose of reducing costs.

To ensure that the planar optical waveguide-based coupling structuredesigned in this embodiment of the present disclosure can be moreefficiently completed in a manufacturing process of an industrialautomatic device and the defect rate can be reduced, there is apreferred implementation solution, specifically: the coupling gap d hasa value of 5 μm to 50 μm, and the coupling gap is filled with a matchinggel for refractive index matching. The matching gel is configured toprotect an optical path from external erosion while completing therefractive index matching.

With reference to this embodiment of the present disclosure, a couplingdevice including the single mode active device and the planar opticalwaveguide can be applied to various known optical modules such as anEPON optical module, a GPON optical module, high-speed single-channeloptical modules SFP and SFP+ in data communication, or parallel modulesQSFP and QSFP28 for 40G and 100G optical transmission.

Embodiment 2

Embodiment 1 of the present disclosure provides the coupling structurebased on a planar optical waveguide, and the planar optical waveguidestructure used in Embodiment 1 is described in detail below. The planaroptical waveguide structure includes a silica waveguide for transmittingan optical signal, as shown in FIG. 2 and FIG. 3, specifically:

the silica waveguide includes a coupling section and a conductionsection;

the coupling section is of a regular trapezoidal structure or aninverted trapezoidal structure, where a surface of the coupling sectionfor being coupled to the single mode active device is a trapezoid top,and a surface of the coupling section connected with the conductionsection is a trapezoid bottom.

An embodiment of the present disclosure provides a preferredimplementation solution from the perspective of process complexity ofmanufacturing the planar optical waveguide structure. Four side faces ofthe regular trapezoidal structure or the inverted trapezoidal structurerelative to the trapezoid top and the trapezoid bottom include a set ofparallel faces and a set of inclined planes. Moreover, the parallelfaces are perpendicular to a growth direction of the planar opticalwaveguide. According to the preferred implementation solution, a processdifficulty of growing the planar optical waveguide can be reduced. Withreference to this embodiment of the present disclosure, there are stilltwo alternative implementation solutions:

Solution 1: The four side faces of the regular trapezoidal structure orthe inverted trapezoidal structure relative to the trapezoid top and thetrapezoid bottom include a set of parallel faces and a set of inclinedplanes. Moreover, the parallel faces are perpendicular to a horizontalplane of the planar optical waveguide.

Solution 2: The four side faces of the regular trapezoidal structure orthe inverted trapezoidal structure relative to the trapezoid top and thetrapezoid bottom include two sets of inclined planes.

The foregoing two alternative implementation solutions can also achievean effect of improving alignment tolerance, but complexity of amanufacturing process is higher than that of the preferred solution.

With reference to this embodiment of the present disclosure, to beapplicable to the coupling structure in Embodiment 1 and further improveefficiency of industrial automatic processing, there is a preferredimplementation solution: A single mode active device mounting base isdisposed on the planar optical waveguide, and a bonding pad and analignment mark are disposed on the base. Correspondingly, the singlemode active device is provided with a bonding pad for eutectic bondingor thermo-compression bonding and an alignment mark that matches theplanar optical waveguide.

With reference to this embodiment of the present disclosure, a set ofimplementable parameters are provided. Specifically, a trapezoid topsurface width W1 of the coupling section=2.6 μm, and a trapezoid topsurface height H1=4.4 μm; a trapezoid bottom surface width W2=3.3 μm,and a trapezoid bottom surface height H2=4.4 μm; and a trapezoid lengthL=800 μm. Correspondingly, a width W of the conduction section=3.3 μmand a height H=4.4 μm.

Embodiment 3

In addition to the coupling structure described in Embodiment 1 and theplanar optical waveguide structure described in Embodiment 2, based onthe foregoing structure, this embodiment of the present disclosureprovides a coupling method based on a planar optical waveguide. A silicawaveguide in the planar optical waveguide includes a coupling sectionand a conduction section. As shown in FIG. 6, the method includes:

Step 201: Generate the planar optical waveguide, where the couplingsection is of a trapezoidal structure, where a trapezoid top surfacewidth W1=2.6 μm, and a trapezoid top surface height H1=4.4 μm; atrapezoid bottom surface width W2=3.3 μm, and a trapezoid bottom surfaceheight H2=4.4 μm; and a trapezoid length L=800 μm.

Preferably, the PLC waveguide in this embodiment of the presentdisclosure is a silicon-based silica embedded rectangular waveguide,where the outside of a coupling section core layer and the outside of aconduction section core layer are provided with cladding layers having asame refractive index, and a relative refractive index difference of theinside and the outside of each core layer is 0.013.

Step 202: Generate a single mode active device mounting base on theplanar optical waveguide, and dispose a bonding pad and an alignmentmark on the base.

As shown in FIG. 1, a binding welding spot is formed after the planaroptical waveguide is welded to a bonding pad of a single mode activedevice.

Step 203: Confirm that a selected single mode active device isspecifically a Gaussian single mode semiconductor laser having a centerwavelength of 1310 nm to 1660 nm and a far-field emission angle of 10°to 40° in the X direction and 10° to 45° in the Y direction.

Step 204: Weld the semiconductor laser according to the alignment markon the planar optical waveguide.

With reference to this embodiment of the present disclosure, there is apreferred implementation, and this implementation better conforms to anactual situation of industrial automation manufacturing. To be specific,after the single mode active device and the planar optical waveguide arewelded together, there is a preset coupling gap d between the two, andafter step 204 is executed, the method further includes:

Step 205: Select a matching gel according to coating parameters of thelaser and a refractive index of the silica waveguide, and fill thecoupling gap with the selected matching gel.

FIG. 7 and FIG. 8 show an unoptimized planar optical waveguide PLC,where W=3.3 μm and H=4.4 μm. If the waveguide, combined with the laser(the single mode active device), on the PLC is not optimized, as shownin FIG. 7 and FIG. 8, a front end and a back end are of a same size inthe prior art, and highest coupling efficiency is only 25%, and there isonly one point at which 6 dB alignment tolerance can be achieved. Thatis, welding fixing between the laser and the PLC needs to reach a veryhigh degree of accuracy, and the 6 dB alignment tolerance cannot beachieved if a slight deviation occurs.

Because the coupling efficiency and the 6 dB alignment tolerance varywith a shape of the waveguide, in this embodiment of the presentdisclosure, the shape of the waveguide is optimized, to obtain a 5 μmcoupling gap, and under the application conditions (the laser has acenter wavelength of 1310 nm, a far-field emission angle of 25°×40°, anda light-emitting surface refractive index of 1.48) of adding thematching gel (with a refractive index of 1.48), an optimal waveguideshape is shown in FIG. 2 and FIG. 3, where W1=2.6 μm and H1=4.4 μm;W2=3.3 μm, and H2=4.4 μm; and L=800 μm. Because a shape of the PLC in ahorizontal direction is easily implemented during manufacturing, but itis relatively difficult to implement a shape in a vertical direction, inthe present disclosure, a same size is preferentially used in thevertical direction, and a tapered waveguide is added only in thehorizontal direction (to be specific, the waveguide is extended in thehorizontal direction and has an equal height in the vertical direction,that is, masks are different in process), so that the highest couplingefficiency and the 6 dB alignment tolerance are improved without addinga PLC manufacturing process.

Embodiment 3 of the present disclosure provides only a parameterexample, and the present disclosure further provides a view of acorrespondence between coupling efficiency and a coupling sectionwaveguide width (as shown in FIG. 9, for related parameters of thesingle mode active device and related parameters of the planar opticalwaveguide, refer to the related description of this embodiment, anddetails are not described herein again). Because an impact of thecoupling section waveguide width on the coupling efficiency involvesvarious aspects, including the wavelength of the laser, the refractiveindex difference of the optical waveguide, the light-emitting surfacerefractive index of the laser, and the like, and in the prior art, thereis no formula that can directly derive a relationship between theforegoing several parameters, in the present disclosure, when it isfound that the width (or the height) of the coupling section affects thecoupling efficiency, a relationship curve chart shown in FIG. 9 and aview of a relationship between coupling efficiency and a coupling gapshown in FIG. 10 are further obtained through simulation. Technicalsolutions that can be obtained by a person skilled in the art throughreasonable deduction on the basis of this are within the protectionscope of the present disclosure.

Embodiment 4

With reference to the structures and methods proposed in the foregoingembodiments of the present disclosure, this embodiment provides acorresponding simulation result. In a simulation environment of thisembodiment, a single mode active device is specifically a Gaussiansingle mode semiconductor laser having a center wavelength of 1310 nmand a far-field emission angle of 25°×40°. To match a refractive indexof a silica waveguide, a light-emitting surface refractive index of thelaser is 1.48; a trapezoid top surface width W1 of a couplingsection=2.6 μm, and a trapezoid top surface height H1=4.4 μm; atrapezoid bottom surface width W2=3.3 μm, and a trapezoid bottom surfaceheight H2=4.4 μm; and a trapezoid length L=800 μm. A matching gel has arefractive index of 1.48.

Under the constitution and waveguide shape conditions of the presentdisclosure, according to the simulation result, as shown in FIG. 11,different curves correspond to different coupling efficiency, forexample, a curve of 0.03398 indicates that the coupling efficiency is3.398%. It is learned that highest coupling efficiency is 30%, and 6 dBalignment tolerance is:

X direction=+/−0.75 μm;

Y direction=+/−0.825 μm.

This result greatly extends the 6 dB alignment tolerance. At present,precision of a commercial automatic binding machine can reach +/−0.5 μm.According to the result of the present disclosure, the laser can bedirectly mounted on a planar optical waveguide circuit PLC in anautomatic manner, and passive alignment and direct coupling of the laserto the PLC are completed. The application of an automatic device cangreatly ensure process quality and shorten alignment and welding time,thereby achieving a purpose of reducing costs.

Embodiment 5

Embodiment 5 of the present disclosure provides a structure of a planaroptical waveguide. Compared with the single-core planar opticalwaveguide application scenario in Embodiment 1, this embodiment of thepresent disclosure focuses on a planar optical waveguide structureproposed based on a hybrid multi-core planar optical waveguideapplication scenario. As shown in FIG. 12 to FIG. 15, the structurespecifically includes the following:

The planar optical waveguide internally includes a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering;

the auxiliary waveguide includes a silicon nitride auxiliary waveguidethat is closely attached to the silica main waveguide.

The silicon nitride auxiliary waveguide may be in various structuralforms. For example, the silicon nitride auxiliary waveguide isspecifically of a rectangular cubic structure, a regular trapezoidalstructure, or an inverted trapezoidal structure.

A hybrid multi-core waveguide proposed in this embodiment is a hybridmulti-core waveguide formed by adding the silicon nitride auxiliarywaveguide other than the silica main waveguide to a laser interface endof the PLC, and a purpose is to improve coupling efficiency andalignment tolerance. Because a numerical aperture NA of the siliconnitride waveguide is high, a light-receiving capability of the waveguideis stronger than that of the silica waveguide. A function of the hybridmulti-core waveguide is equivalent to adding a light inlet having ahigher light-receiving capability. After a transition, all auxiliarywaveguides disappear, so that light entering from the additional lightinlet is merged into the main waveguide through parallel coupling of thewaveguide, to achieve the purpose of improving the coupling efficiencyand the alignment tolerance.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution, where the silica main waveguideincludes a coupling section and a conduction section.

The coupling section is of a regular trapezoidal structure or aninverted trapezoidal structure, where a surface of the coupling sectioncoupled to a single mode active device is a trapezoid top, and a surfaceof the coupling section connected with the conduction section is atrapezoid bottom.

Embodiment 6

Based on the planar optical waveguide structure described in Embodiment5, Embodiment 6 of the present disclosure specifically describes anoptional auxiliary waveguide structure. Specifically, the auxiliarywaveguide not only includes a silicon nitride auxiliary waveguide, butalso includes a silica auxiliary waveguide. As shown in FIG. 16, FIG.17, FIG. 18, and FIG. 19, a specific structure is described as follows:

The planar optical waveguide internally includes a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering.

The silicon nitride auxiliary waveguide and the silica auxiliarywaveguide each include a transition portion and a cone portion. Thetransition portion is a rectangular cube extending in a direction oflight transmission, and the cone portion is of a structure with a bottomsurface connected with the transition portion and a cone top extendingin the direction of light transmission. The silicon nitride auxiliarywaveguide is located on an upper surface of the silica main waveguide,and the silica auxiliary waveguide is located on an upper surface of thesilica main waveguide and covers the silicon nitride auxiliarywaveguide.

With reference to the structure of Embodiment 6, there is a preferredsize, referring to FIG. 16 to FIG. 19:

a width W_(main) of a light inlet of the silica main waveguide=5.0 μm,and a height H_(main)=3.0 μm;

a width W_(auxiliary 1) in of a light inlet of the silica auxiliarywaveguide=5.0 μm, and a height H_(auxiliary 1) in =3.0 μm;

a length L_(auxiliary 1) transition of the transition portion of thesilica auxiliary waveguide=100 μm;

a total length L_(auxiliary 1) total of the silica auxiliary waveguide(including the transition portion and the cone portion)=600 μm;

a width T_(auxiliary 1) of the cone top of the silica auxiliarywaveguide=0.1 μm;

a width W_(auxiliary 2 in) of a light inlet of the silicon nitrideauxiliary waveguide=2.0 μm, and a height H_(auxiliary 2 in)=0.06 μm;

a length L_(auxiliary 2) transition of the transition portion of thesilicon nitride auxiliary waveguide=100 μm;

a total length L_(auxiliary 2) total of the silicon nitride auxiliarywaveguide (including the transition portion and the cone portion)=500μm;

a width T_(auxiliary 2) of the cone top of the silicon nitride auxiliarywaveguide=0.1 μm.

There is no gap between the main waveguide and the auxiliary waveguide.All of these dimensions need to be determined through optimization basedon application conditions (an operating wavelength, a PLC function, aprocess condition, and the like). The planar optical waveguide withthese parameters is suitable for a Gaussian single mode semiconductorlaser having a center wavelength of 1310 nm to 1660 nm and a far-fieldemission angle of 10° to 40° in the X direction and 10° to 45° in the Ydirection. If a front end and a back end have a same size in the priorart (a single waveguide), highest coupling efficiency is only 25%, andthere is only one point at which 6 dB alignment tolerance can beachieved. That is, welding fixing between the laser and the PLC needs toreach a very high degree of accuracy, and the 6 dB alignment tolerancecannot be achieved if a slight deviation occurs. In this embodiment, aGaussian single mode semiconductor laser having a center wavelength of1310 nm and a far-field emission angle of 25°×40° is used for simulationtesting to obtain a schematic view of location tolerance shown in FIG.20.

In Embodiment 6 of the present disclosure, the planar optical waveguidestructure is improved sufficiently, and the highest coupling efficiencyreaches 46.6%.

The 6 dB alignment tolerance (shown in FIG. 20) reaches the following inthe X and Y directions respectively:

X direction=+/−0.95 μm;

Y direction=+/−0.95 μm.

Compared with a method of a single waveguide, according to the foregoingresult, the highest coupling efficiency is improved, and further, the 6dB alignment tolerance is extended. At present, precision of acommercial automatic binding machine can reach +/−0.5 According to theresult of this embodiment of the present disclosure, the laser can bedirectly mounted on the PLC in an automatic manner, and passivealignment and direct coupling of the laser to the PLC are completed. Theapplication of an automatic device can greatly ensure process qualityand shorten alignment and welding time, thereby achieving a purpose ofreducing costs.

Embodiment 7

Based on the planar optical waveguide structure described in Embodiment5, Embodiment 7 of the present disclosure specifically describes anoptional auxiliary waveguide structure, as shown in FIG. 21, FIG. 22,and FIG. 23. Specifically, a silicon nitride auxiliary waveguideincludes two sub-auxiliary waveguides, where a first sub-auxiliarywaveguide is located on an upper surface of a silica main waveguide, anda second sub-auxiliary waveguide is located on a lower surface of thesilica main waveguide.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution. As shown in FIG. 21, the firstsub-auxiliary waveguide and the second sub-auxiliary waveguide eachinclude a transition portion and a cone portion, where the transitionportion is a rectangular cube extending in a direction of lighttransmission; and the cone portion is of a structure with a bottomsurface connected with the transition portion and a cone top extendingin the direction of light transmission.

a width W_(main in) of a light inlet of the silica main waveguide=3.0μm, and a height H_(main in)=1.8 μm;

an intermediate transition portion length L_(main) transition of thesilica main waveguide=500 μm;

a width W_(main out) of a light outlet at the rear of the silica mainwaveguide=3.0 μm, and a height H_(main out)=4.0 μm;

a width W_(auxiliary in) of a light inlet of the silicon nitrideauxiliary waveguide=1.8 μm, and a height H_(auxiliary in)=0.048 μm;

a length L_(auxiliary transition) of the transition portion of thesilicon nitride auxiliary waveguide=400 μm;

a total length L_(auxiliary total) of the silicon nitride auxiliarywaveguide (including the transition portion and the cone portion)=500μm;

a width T_(auxiliary) of the cone top of the silicon nitride auxiliarywaveguide=0.1 μm.

There is no gap between the main waveguide and the auxiliary waveguide.All of these dimensions need to be determined through optimization basedon application conditions (an operating wavelength, a PLC function, aprocess condition, and the like). The planar optical waveguide withthese parameters is suitable for a Gaussian single mode semiconductorlaser having a center wavelength of 1310 nm to 1660 nm and a far-fieldemission angle of 10° to 40° in the X direction and 10° to 45° in the Ydirection. If a front end and a back end have a same size in the priorart, highest coupling efficiency is only 25%, and there is only onepoint at which 6 dB alignment tolerance can be achieved. That is,welding fixing between the laser and the PLC needs to reach a very highdegree of accuracy, and the 6 dB alignment tolerance cannot be achievedif a slight deviation occurs. In this embodiment, a Gaussian single modesemiconductor laser having a center wavelength of 1310 nm and afar-field emission angle of 25°×40° is used for simulation testing toobtain a schematic view of location tolerance shown in FIG. 24.

In Embodiment 7 of the present disclosure, the planar optical waveguidestructure is improved sufficiently, the highest coupling efficiencyreaches 49.43%, and the 6 dB alignment tolerance (as shown in FIG. 24)reaches the following in the X and Y directions respectively:

X direction=+/−1.0 μm;

Y direction=+/−1.0 μm.

Compared with a method of a single waveguide method, according to theforegoing result, the highest coupling efficiency is improved, andfurther, the 6 dB alignment tolerance is extended. At present, precisionof a commercial automatic binding machine can reach +/−0.5 According tothe result of this embodiment of the present disclosure, the laser canbe directly mounted on the PLC in an automatic manner, and passivealignment and direct coupling of the laser to the PLC are completed. Theapplication of an automatic device can greatly ensure process qualityand shorten alignment and welding time, thereby achieving a purpose ofreducing costs.

Embodiment 8

Based on the planar optical waveguide structure described in Embodiment5, Embodiment 8 of the present disclosure specifically describes anoptional auxiliary waveguide structure, as shown in FIG. 25, FIG. 26,and FIG. 27. Specifically, a silicon nitride auxiliary waveguideincludes three sub-auxiliary waveguides, where a first sub-auxiliarywaveguide, a second sub-auxiliary waveguide, and a third sub-auxiliarywaveguide are located on an upper surface of a silica main waveguide;the three sub-auxiliary waveguides are each of a cone structure, where acone top extends in a direction of light transmission.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution, where the three sub-auxiliarywaveguides are spaced apart by a predetermined distance, and the threesub-auxiliary waveguides are arranged in parallel.

A width W_(main in) of a light inlet of the silica main waveguide=5.0μm, and a height H_(main in)=3.8 μm;

a width W_(auxiliary in) of a light inlet of the silicon nitrideauxiliary waveguide=1.5 μm, and a height H_(auxiliary in)=0.05 μm;

a total length L_(auxiliary total) of the silicon nitride auxiliarywaveguide=1000 μm;

a width T_(auxiliary) of the cone top of the silicon nitride auxiliarywaveguide=0.1 μm;

the gap G_(auxiliary) between the silicon nitride auxiliarywaveguides=0.1 μm.

The planar optical waveguide with these parameters is suitable for aGaussian single mode semiconductor laser having a center wavelength of1310 nm to 1660 nm and a far-field emission angle of 10° to 40° in the Xdirection and 10° to 45° in the Y direction. If a front end and a backend have a same size in the prior art, highest coupling efficiency isonly 25%, and there is only one point at which 6 dB alignment tolerancecan be achieved. That is, welding fixing between the laser and the PLCneeds to reach a very high degree of accuracy, and the 6 dB alignmenttolerance cannot be achieved if a slight deviation occurs. In thisembodiment, a Gaussian single mode semiconductor laser having a centerwavelength of 1310 nm and a far-field emission angle of 25°×40° is usedfor simulation testing to obtain a schematic view of location toleranceshown in FIG. 28.

In Embodiment 8 of the present disclosure, the planar optical waveguidestructure is improved sufficiently, the highest coupling efficiencyreaches 43.7%, and the 6 dB alignment tolerance (as shown in FIG. 28)reaches the following in the X and Y directions respectively:

X direction=+/−1.35 μm;

Y direction=+/−0.95 μm.

A technical effect of a hybrid multi-core waveguide formed by adding asilicon nitride auxiliary waveguide having a large numerical aperture NAis that the present disclosure has very high coupling efficiency indirect coupling of an active device to a planar optical waveguide. Atthe same time, the 6 dB alignment tolerance also is improvedaccordingly. At present, precision of a commercial automatic bindingmachine can reach +/−0.5 μm. According to the result of the presentdisclosure, the laser can be directly mounted on the PLC in an automaticmanner, and passive alignment and direct coupling of the laser to thePLC are completed. The application of an automatic device can greatlyensure process quality and shorten alignment and welding time, therebyachieving a purpose of reducing costs.

Embodiment 9

A coupling structure of a planar optical waveguide includes a planaroptical waveguide with the structure described in any one of Embodiment5 to Embodiment 8. The coupling structure further includes a single modeactive device, and the single mode active device includes but is notlimited to an FP laser, a DFB laser, an EML, and an SOA. As shown inFIG. 12, the coupling structure is specifically as follows:

The planar optical waveguide is provided with a single mode activedevice fixing platform located on a light-incident side of the silicamain waveguide and the silicon nitride auxiliary waveguide;

a bonding pad and an alignment mark are disposed on the fixing platform,where the bonding pad is configured to be welded to a correspondingbonding pad on the single mode active device; and the alignment mark isconfigured to provide addressing of a binding welding spot for anautomatic binding machine.

In the coupling structure, a coupling gap d is formed between the singlemode active device and light inlets of the silica main waveguide and thesilicon nitride auxiliary waveguide, and the coupling gap is filled witha matching gel for refractive index matching.

Embodiment 10

This embodiment of the present disclosure provides a coupling method ofa planar optical waveguide. As shown in FIG. 29, the coupling methodincludes:

Step 301: Determine an optical wavelength and a far-field emission angleof a single mode active device.

Step 302: Select, according to the far-field emission angle, a planaroptical waveguide adapted to the far-field emission angle.

Alternatively, the planar optical waveguide includes each planar opticalwaveguide described in Embodiment 5 to Embodiment 8.

Step 303: Weld the single mode active device according to a bonding padand an alignment mark that tare disposed on the planar opticalwaveguide.

Step 304: Fill a coupling gap between a light outlet of the single modeactive device and a light inlet of the planar optical waveguide with amatching gel.

During implementation of this embodiment of the present disclosure, whenthe planar optical waveguide includes a main waveguide and an auxiliarywaveguide, there is a preferred implementation solution of selecting,according to the far-field emission angle, the planar optical waveguideadapted to the far-field emission angle, and the implementation solutionspecifically includes:

determining, according to the far-field emission angle, that the singlemode active device is a transverse elliptical light source or alongitudinal elliptical light source; and

if the single mode active device is the transverse elliptical lightsource, selecting a planar optical waveguide with an auxiliary waveguideembedded in a single-side tiling manner on a main waveguide; or

if the single mode active device is the longitudinal elliptical lightsource, selecting a planar optical waveguide with an auxiliary waveguideembedded in a double-side tiling manner on a main waveguide.

With reference to this embodiment of the present disclosure, there areseveral preferred implementation solutions for the planar opticalwaveguide with the auxiliary waveguide embedded in a double-side tilingmanner on the main waveguide, specifically:

a silicon nitride auxiliary waveguide includes three sub-auxiliarywaveguides, where a first sub-auxiliary waveguide, a secondsub-auxiliary waveguide and a third sub-auxiliary waveguide are locatedon an upper surface of the silica main waveguide; and the threesub-auxiliary waveguides are each of a cone structure, where a cone topextends in a direction of light transmission; or

a silicon nitride auxiliary waveguide and a silica auxiliary waveguideeach include a transition portion and a cone portion, and the transitionportion is a rectangular cube extending in a direction of lighttransmission; the cone portion is of a structure with a bottom surfaceconnected with the transition portion and a cone top extending in thedirection of light transmission; where the silicon nitride auxiliarywaveguide is located on an upper surface of the silica main waveguide,and the silica auxiliary waveguide is located on the upper surface ofthe silica main waveguide and covers the silicon nitride auxiliarywaveguide.

The planar optical waveguide with the auxiliary waveguide embedded in adouble-side tiling manner on the main waveguide is specificallyimplemented as follows:

a silicon nitride auxiliary waveguide includes two sub-auxiliarywaveguides, where a first sub-auxiliary waveguide is located on an uppersurface of the silica main waveguide, and a second sub-auxiliarywaveguide is located on a lower surface of the silica main waveguide.

Embodiment 11

Compared with the single-core planar optical waveguide applicationscenario in Embodiment 1 and the hybrid multi-core planar opticalwaveguide application scenario in Embodiment 5, Embodiment 11 of thepresent disclosure provides a multi-core planar optical waveguidestructure, as shown in FIG. 30:

The planar optical waveguide internally includes a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering.

The auxiliary waveguide includes one or more silica auxiliary waveguidesthat are disposed at a predetermined center distance from the silicamain waveguide.

The center distance is used to ensure that the one or more silicaauxiliary waveguides and the silica main waveguide produce a sufficientcoupling effect on light receiving surfaces.

The planar optical waveguide structure including one or more silicaauxiliary waveguides and proposed in this embodiment of the presentdisclosure can complete passive alignment and direct coupling of thelaser to the PLC, so that alignment tolerance can be improved comparedwith the prior art. Based on improvement of the alignment tolerance, arequirement for process precision of an automatic device can be furtherreduced, alignment and welding time can be shortened, and a defectiverate can be further reduced, thereby achieving a purpose of reducingcosts.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution. As shown in FIG. 31, the silica mainwaveguide includes a coupling section and a conduction section. Thecoupling section is of a regular trapezoidal structure or an invertedtrapezoidal structure, where a surface of the coupling section coupledto a single mode active device is a trapezoid top, and a surface of thecoupling section connected with the conduction section is a trapezoidbottom.

Embodiment 12

Based on the multi-core planar optical waveguide structure described inEmbodiment 11, Embodiment 12 of the present disclosure specificallydescribes constitution of an optional silica auxiliary waveguide, asshown in FIG. 32, FIG. 33, and FIG. 34:

The planar optical waveguide internally includes a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering.

The auxiliary waveguide specifically includes two sub-auxiliarywaveguides, where a first sub-auxiliary waveguide is located on an upperside of the silica main waveguide, and a second sub-auxiliary waveguideis located on as lower side of the silica main waveguide; and the silicaauxiliary waveguide is disposed at a predetermined center distance fromthe silica main waveguide.

The center distance is used to ensure that the one or more silicaauxiliary waveguides and the silica main waveguide produce a sufficientcoupling effect on light receiving surfaces.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution, as shown in FIG. 32 (a top view of anA-A′ horizontal cross-section in FIG. 30), and the first sub-auxiliarywaveguide and the second sub-auxiliary waveguide each include a regulartrapezoidal structure.

A trapezoid top and a light inlet of the silica main waveguide arelocated on a same side; a trapezoid bottom extends in a direction oflight transmission, and a width of the trapezoid bottom is the same as awidth of the silica main waveguide.

Side faces of a first sub-auxiliary waveguide trapezoid and a secondsub-auxiliary waveguide trapezoid adjacent to upper and lower planes ofthe silica main waveguide are kept parallel to the upper and lowerplanes of the silica main waveguide respectively.

In an optional implementation solution, the first sub-auxiliarywaveguide and the second sub-auxiliary waveguide each may be of aninverted trapezoidal structure. Compared with the foregoing solution, asshown in FIG. 34, a cross-sectional area of each of the firstsub-auxiliary waveguide and the second sub-auxiliary waveguide in thedirection of light transmission becomes smaller.

With reference to this embodiment of the present disclosure, when aselected single mode active device has a center wavelength of 1310 nm to1660 nm and a far-field emission angle of 10° to 40° in the X directionand 10° to 45° in the Y direction, an embodiment of the presentdisclosure further provides a set of parameters of the main waveguideand the auxiliary waveguide, referring to FIG. 32 and FIG. 33,specifically:

a width W_(main) of the light inlet of the main waveguide=3.0 μm, and aheight H_(main)=3.0 μm;

a width W_(auxiliary in) of a light inlet of the auxiliary waveguide=2.6μm, and a height H_(auxiliary in)=3.0 μm;

a width W_(auxiliary out) of the trapezoid bottom of the auxiliarywaveguide=3.0 μm, and a height H_(auxiliary out)=3.0 μm;

a length W_(auxiliary) of the auxiliary wavelength=100 μm, and thecenter distance Ay between the main waveguide and the auxiliarywaveguide=3.6 μm.

In various implementations of this embodiment, there is animplementation, where the main waveguide and the auxiliary waveguide arein the multi-core planar optical waveguide structure, and the inside andthe outside of respective core layers of the main waveguide and theauxiliary waveguide are provided with cladding layers having similarrefractive indexes; and a relative refractive index difference is 0.013.All of these dimensions need to be determined through optimization basedon application conditions (an operating wavelength, a PLC function, aprocess condition, and the like). If a front end and a back end have asame size in the prior art, highest coupling efficiency is only 25%, andthere is only one point at which 6 dB alignment tolerance can beachieved. That is, welding fixing between the laser and the PLC needs toreach a very high degree of accuracy, and the 6 dB alignment tolerancecannot be achieved if a slight deviation occurs. FIG. 35 is adistribution view coupling efficiency obtained through simulation undersuch a parameter setting that a single mode active device has a centerwavelength of 1310 nm and a far-field emission angle of 25°×40° in the12 embodiment. The highest coupling efficiency is 32%, and the 6 dBalignment tolerance (as shown in FIG. 35) is:

X direction=+/−0.825 μm;

Y direction=+/−0.9 μm.

Compared with a method of a single waveguide, according to the foregoingresult, the highest coupling efficiency is improved, and further, the 6dB alignment tolerance is extended. At present, precision of acommercial automatic binding machine can reach +/−0.5 According to theresult of this embodiment of the present disclosure, the laser can bedirectly mounted on the PLC in an automatic manner, and passivealignment and direct coupling of the laser to the PLC are completed. Theapplication of an automatic device can greatly ensure process qualityand shorten alignment and welding time, thereby achieving a purpose ofreducing costs.

Embodiment 13

Based on the multi-core planar optical waveguide structure described inEmbodiment 11, Embodiment 13 of the present disclosure specificallydescribes constitution of an optional silica auxiliary waveguide, asshown in FIG. 36, FIG. 37, and FIG. 38.

The planar optical waveguide internally includes a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering.

The auxiliary waveguide specifically includes eight sub-auxiliarywaveguides, where a first sub-auxiliary waveguide 01 is located on anupper side of the silica main waveguide; a second sub-auxiliarywaveguide 02 is located on a lower side of the silica main waveguide; athird sub-auxiliary waveguide 03 is located on a left side of the silicamain waveguide; the fourth sub-auxiliary waveguide 04 is located on aright side of the silica main waveguide; a fifth sub-auxiliary waveguide05 is located on an upper left side of the silica main waveguide, on aleft side of the first sub-auxiliary waveguide, and on an upper side ofthe third sub-auxiliary waveguide; a sixth sub-auxiliary waveguide 06 islocated on an upper right side of the silica main waveguide, on theright side of the first sub-auxiliary waveguide, and on an upper side ofthe fourth sub-auxiliary waveguide; a seventh sub-auxiliary waveguide 07is located on a lower left side of the silica main waveguide, on a leftside of the second sub-auxiliary waveguide, and on a lower side of thethird sub-auxiliary waveguide; an eighth sub-auxiliary waveguide 08 islocated on a lower right side of the silica main waveguide, on a rightside of the second sub-auxiliary waveguide, and on a lower side of thefourth sub-auxiliary waveguide; and the silica auxiliary waveguide isdisposed at a predetermined center distance from the silica mainwaveguide.

The center distance is used to ensure that the one or more silicaauxiliary waveguides and the silica main waveguide produce a sufficientcoupling effect on light receiving surfaces.

With reference to this embodiment of the present disclosure, there is apreferred implementation solution, as shown in FIG. 36 (a top view of aA-A′ horizontal cross-section in FIG. 30). Each sub-auxiliary waveguideis specifically of a regular trapezoidal structure, and four side facesconnected with a trapezoid top and a trapezoid bottom are all inclinedplanes, where the trapezoid top and a light inlet of the silica mainwaveguide are located on a same side of the multi-core planar opticalwaveguide.

In an optional implementation solution, silica auxiliary waveguides eachmay be of an inverted trapezoidal structure. Compared with the foregoingsolution, as shown in FIG. 38, a cross-sectional area of each of thefirst sub-auxiliary waveguide and the second sub-auxiliary waveguide ina direction of light transmission becomes smaller.

In various implementations of this embodiment, there is animplementation, where the main waveguide and the auxiliary waveguide arein the multi-core planar optical waveguide structure, and the inside andthe outside of respective core layers of the main waveguide and theauxiliary waveguide are provided with cladding layers having similarrefractive indexes; and a relative refractive index difference is 0.013.

With reference to this embodiment of the present disclosure, when aselected single mode active device has a center wavelength of 1310 nm to1660 nm and a far-field emission angle of 10° to 40° in the X directionand 10° to 45° in the Y direction, an embodiment of the presentdisclosure further provides a set of parameters of the main waveguideand the auxiliary waveguide, referring to FIG. 36 and FIG. 37,specifically:

a width W_(main) of the light inlet of the main waveguide=3.0 μm, and aheight H_(main)=3.0 μm;

a width W_(auxiliary in) of a light inlet of the auxiliary waveguide=2.5μm, and a height H_(auxiliary in)=1.7273 μm;

a width W_(auxiliary out) of the trapezoid bottom of the auxiliarywaveguide=3.0 μm, and a height H_(auxiliary out) is =3.5 μm;

a length L_(auxiliary) of the auxiliary waveguide=100 μm;

the center distance Ax between the main waveguide and the auxiliarywaveguide in the X direction=3.5 μm;

the center distance Ay between the main waveguide and the auxiliarywaveguide in the Y direction=3.5 μm.

All of these dimensions need to be determined through optimization basedon application conditions (an operating wavelength, a PLC function, aprocess condition, and the like). If a front end and a back end have asame size in the prior art, highest coupling efficiency is only 25%, andthere is only one point at which 6 dB alignment tolerance can beachieved. That is, welding fixing between the laser and the PLC needs toreach a very high degree of accuracy, and the 6 dB alignment tolerancecannot be achieved if a slight deviation occurs. FIG. 39 is adistribution view of coupling efficiency obtained through simulationunder such a parameter setting that a single mode active device has acenter wavelength of 1310 nm and a far-field emission angle of 25°×40°in the 13 embodiment. The highest coupling efficiency is 33%, and the 6dB alignment tolerance (as shown in FIG. 39) is:

X direction=+/−0.95 μm;

Y direction=+/−0.95 μm.

Compared with a method of a single waveguide, according to the foregoingresult, the highest coupling efficiency is improved, and further, the 6dB alignment tolerance is extended. At present, precision of acommercial automatic binding machine can reach +/−0.5 According to theresult of this embodiment of the present disclosure, the laser can bedirectly mounted on the PLC in an automatic manner, and passivealignment and direct coupling of the laser to the PLC are completed. Theapplication of an automatic device can greatly ensure process qualityand shorten alignment and welding time, thereby achieving a purpose ofreducing costs.

Embodiment 12 and Embodiment 13 of the present disclosure providestructural layout manners of a linear silica auxiliary waveguide and asquare-shaped silica auxiliary waveguides, and a person skilled in theart may design layout manners of a +-shaped silica auxiliary waveguideand a X-shaped silica auxiliary waveguide based on the foregoingpreferred solutions, and the layout manners are also within theprotection scope of the present disclosure.

Embodiment 14

This embodiment of the present disclosure further provides a multi-coreplanar optical waveguide coupling structure including a multi-coreplanar optical waveguide with the structure described in Embodiment 11,12, or 13. The coupling structure further includes a single mode activedevice, where the single mode active device includes but is not limitedto an FP laser, a DFB laser, an EML, and an SOA. As shown in FIG. 30,the coupling structure is specifically as follows:

The multi-core planar optical waveguide is provided with a single modeactive device fixing platform located on a light-incident side of asilica main waveguide and a silica auxiliary waveguide.

A bonding pad and an alignment mark are disposed on the fixing platform,where the bonding pad is configured to be welded to a correspondingbonding pad on the single mode active device; and the alignment mark isconfigured to provide addressing of a binding welding spot for anautomatic binding machine.

As shown in FIG. 30, a bonding pad on the multi-core planar opticalwaveguide is also referred to as a binding welding spot.

In the coupling structure, a coupling gap d is formed between the singlemode active device and light inlets of the silica main waveguide and thesilica auxiliary waveguide, and the coupling gap is filled with amatching gel for refractive index matching.

With reference to this embodiment of the present disclosure, thecoupling structure including the single mode active device and themulti-core planar optical waveguide specifically includes an EPONoptical module, a GPON optical module, high-speed single-channel opticalmodules SFP and SFP+ in data communication, or parallel modules QSFP andQSFP28 for 40G and 100G optical transmission.

It should be noted that because content of information exchange andexecution process and the like of modules and units in the foregoingapparatus and system is based on a same idea as the embodiment of theprocessing method in the present disclosure, for specific content,reference may be made to the description of the embodiment of the methodin the present disclosure, and details are not described herein again.

A person of ordinary skill in the art may understand that all or somesteps in various methods of the embodiments can be completed by aprogram instructing related hardware, and the program may be stored in acomputer readable storage medium, and the storage medium may include aread only memory (ROM), a random access memory (RAM), a magnetic disk,an optical disc, or the like.

The foregoing descriptions are merely the preferred embodiments of thepresent disclosure, and are not intended to limit the presentdisclosure. Any modifications, equivalent substitutions, andimprovements made within the spirit and principles of the presentdisclosure shall fall within the protection scope of the presentdisclosure.

What is claimed is:
 1. A planar optical waveguide structure, wherein theplanar optical waveguide internally comprises a silica main waveguidefor transmitting an optical signal, and an auxiliary waveguide forassisting light entering; the auxiliary waveguide comprises a siliconnitride auxiliary waveguide that is closely attached to the silica mainwaveguide; the auxiliary waveguide further comprises a silica auxiliarywaveguide, and the silicon nitride auxiliary waveguide and the silicaauxiliary waveguide each comprise a transition portion and a coneportion; the transition portion is a rectangular cube extending in adirection of light transmission; the cone portion is of a structure witha bottom surface connected with the transition portion and a cone topextending in the direction of light transmission, wherein the siliconnitride auxiliary waveguide is located on an upper surface of the silicamain waveguide, and the silica auxiliary waveguide is located on theupper surface of the silica main waveguide and covers the siliconnitride auxiliary waveguide; wherein the width of silica auxiliarywaveguide is more than silicon nitride auxiliary waveguide, so when thesilica auxiliary waveguide covers the silicon nitride auxiliarywaveguide, just leave entrance of silicon nitride auxiliary waveguideout of the silica auxiliary waveguide and the silica main waveguide. 2.The planar optical waveguide structure according to claim 1, wherein thesilicon nitride auxiliary waveguide comprises two sub-auxiliarywaveguides, wherein a first sub-auxiliary waveguide is located on theupper surface of the silica main waveguide, and a second sub-auxiliarywaveguide is located on a lower surface of the silica main waveguide. 3.The planar optical waveguide structure according to claim 2, wherein thefirst sub-auxiliary waveguide and the second sub-auxiliary waveguideeach comprise a transition portion and a cone portion, wherein thetransition portion is a rectangular cube extending in the direction oflight transmission; and the cone portion is of a structure with a bottomsurface connected with the transition portion and a cone top extendingin the direction of light transmission.
 4. The planar optical waveguidestructure according to claim 1, wherein the silicon nitride auxiliarywaveguide comprises three sub-auxiliary waveguides, wherein a firstsub-auxiliary waveguide, a second sub-auxiliary waveguide, and a thirdsub-auxiliary waveguide are located on the upper surface of the silicamain waveguide; and the three sub-auxiliary waveguides are each of acone structure, wherein a cone top extends in the direction of lighttransmission.
 5. The planar optical waveguide structure according toclaim 4, wherein the three sub-auxiliary waveguides are spaced apart bya predetermined distance, and the three sub-auxiliary waveguides arearranged in parallel.
 6. A planar optical waveguide structure, whereinthe planar optical waveguide internally comprises a silica mainwaveguide for transmitting an optical signal, and an auxiliary waveguidefor assisting light entering; the auxiliary waveguide comprises one ormore silica auxiliary waveguides that are positioned at a predeterminedcenter distance from the silica main waveguide.
 7. The planar opticalwaveguide structure according to claim 6, wherein the auxiliarywaveguide specifically comprises two sub-auxiliary waveguides, wherein afirst sub-auxiliary waveguide is located on an upper side of the silicamain waveguide, and a second sub-auxiliary waveguide is located on alower side of the silica main waveguide.
 8. The planar optical waveguidestructure according to claim 7, wherein the first sub-auxiliarywaveguide and the second sub-auxiliary waveguide each comprise a regulartrapezoidal structure, wherein a trapezoid top and a light inlet of thesilica main waveguide are located on a same side; a trapezoid bottomextends in a direction of light transmission, and a width of thetrapezoid bottom is the same as a width of the silica main waveguide,wherein side faces of a first sub-auxiliary waveguide trapezoid and asecond sub-auxiliary waveguide trapezoid adjacent to upper and lowerplanes of the silica main waveguide are kept parallel to the upper andlower planes of the silica main waveguide respectively.
 9. The planaroptical waveguide structure according to claim 7, wherein when aselected single mode active device has a center wavelength of 1310 nm to1660 nm and a far-field emission angle of 25°×40°, parameters of themain waveguide and the auxiliary waveguide are specifically as follows:a width W_(main) of the light inlet of the main waveguide=3.0 μm, and aheight H_(main)=3.0 μm; a width W_(auxiliary) in of a light inlet of theauxiliary waveguide=2.6 μm, and a height H_(auxiliary in)=3.0 μm; awidth W_(auxiliary out) of the trapezoid bottom of the auxiliarywaveguide=3.0 μm, and a height H_(auxiliary out)=3.0 μm; a lengthL_(auxiliary) of the auxiliary waveguide=100 μm, and the center distanceAy between the main waveguide and the auxiliary waveguide=3.6 μm. 10.The planar optical waveguide structure according to claim 7, wherein themain waveguide and the auxiliary waveguide are in a multi-core planaroptical waveguide structure, the inside and the outside of respectivecore layers of the main waveguide and the auxiliary waveguide areprovided with cladding layers having similar refractive indexes, and arelative refractive index difference is 0.013.
 11. The planar opticalwaveguide structure according to claim 6, wherein the auxiliarywaveguide specifically comprises eight sub-auxiliary waveguides, whereina first sub-auxiliary waveguide is located on an upper side of thesilica main waveguide; a second sub-auxiliary waveguide is located on alower side of the silica main waveguide; a third sub-auxiliary waveguideis located on a left side of the silica main waveguide; a fourthsub-auxiliary waveguide is located on a right side of the silica mainwaveguide; a fifth sub-auxiliary waveguide is located on an upper leftside of the silica main waveguide, on a left side of the firstsub-auxiliary waveguide, and on an upper side of the third sub-auxiliarywaveguide; a sixth sub-auxiliary waveguide is located on an upper rightside of the silica main waveguide, on the right side of the firstsub-auxiliary waveguide, and on an upper side of the fourthsub-auxiliary waveguide; a seventh sub-auxiliary waveguide is located ona lower left side of the silica main waveguide, on a left side of thesecond sub-auxiliary waveguide, and on a lower side of the thirdsub-auxiliary waveguide; and an eighth sub-auxiliary waveguide islocated on a lower right side of the silica main waveguide, on a rightside of the second sub-auxiliary waveguide, and on a lower side of thefourth sub-auxiliary waveguide.
 12. The planar optical waveguidestructure according to claim 11, wherein each sub-auxiliary waveguide isspecifically of a regular trapezoidal structure, and four side facesconnected with a trapezoid top and a trapezoid bottom are all inclinedplanes, wherein the trapezoid top and a light inlet of the silica mainwaveguide are located on a same side of a multi-core planar opticalwaveguide.